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  • https://doi.org/10.1109/asmc.2006.1638775Copy DOI Icon

Cycle Time Perspectives for Small Transfer Batch Size

  • May 22, 2006
  • D.r Wright +1 more
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Abstract

This paper discusses advantages and disadvantages of smaller transfer batch size in an automated semiconductor factory. A framework is suggested by which the theoretical cycle time is determined from the point-of-view of the wafer, not the lot. Using this framework, we then look at the possible application of a virtual cluster tool by identifying requirements on the process times and transport system. Benefits and risks are then discussed for the approach, using a simple example

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