- Research Article
- 10.1017/s0424820100068928
Resolution of a Transmitted Electron Image Formed by A Scanning Electron Microscope
- Oct 01, 1970
- Proceedings, annual meeting, Electron Microscopy Society of America
- S Takashima + 2 more +2
The resolution of a conventional transmission electron microscope (TEM) deteriorates as the specimen thickness increases, because chromatic aberration of the objective lens is caused by the energy loss of electrons). In the case of a scanning electron microscope (SEM), chromatic aberration does not exist as the restrictive factor for the resolution of the transmitted electron image, for the SEM has no imageforming lens. It is not sure, however, that the equal resolution to the probe diameter can be obtained in the case of a thick specimen. To study the relation between the specimen thickness and the resolution of the trans-mitted electron image obtained by the SEM, the following experiment was carried out.
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