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Experiments with an Imaging Filter in a CTEM

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Abstract

The installation of an imaging energy filter extends the imaging and analytical capabilities of a conventional transmission electron microscope (CTEM) considerably. We report here on experiments which demonstrate the versatility of such a device. The arrangement of our system is shown in Fig. 1. The experiments performed pertain to:The improvement of contrast in thick specimens by exclusion of inelastically scattered electrons. The spatial resolution of the electron microscope can be preserved by the correction of second-order aberrations with additional electromagnetic hexapoles.The determination of the concentration of light elements with EELS at a spatial resolution better than 10 nm. The chemical structure of ceramic material (SI3N4and SiC with additions) could thus be elucidated. A study on the extended fine structure in the energy loss spectra of the oxygen and magnesium K edges in MgO (Fig. 2) did confirm the theoretical prediction for that material.

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