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Generic noise criterion curves for sensitive equipment

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Abstract

Electron beam-based instruments are sensitive to the environment in which they operate. Adverse environments may limit their achievable resolution. Many equipment manufacturers provide specifications for the acceptable level of various environmental conditions, such as vibration, EMI, and acoustic noise. However, the quality of the specifications vary significantly, from well-defined to conjectural. Additionally, during the design of a facility, the specific instruments that will be used may not yet be known. Thus, it is useful to have "generic" criteria, intended to represent entire classes of instruments, to use in the design of facilities. Generic vibration criteria exist to aid in the design of laboratories, though there have been no such instrument-based generic criteria available for acoustic noise. The generic noise criteria that are currently used in lab design (NC, NR, dBA, etc.) were established to address the effect of noise on human beings. Using noise specifications for a significant number of instruments with varying resolving powers, correlation of resolution with environmental noise is demonstrated. Based on the data reviewed, generic noise criterion curves have been developed and presented for use in the design of facilities that contain noise-sensitive equipment. These are applicable when other well-defined and specific criteria are not available.

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