• Home
  • Search
  • Generic vibration criteria for nanotechnology experiments
  • Cite Icon3
  • https://doi.org/10.1117/12.619404Copy DOI Icon

Generic vibration criteria for nanotechnology experiments

  • Abstract
  • Literature Map
  • Citations
  • Similar Papers
Abstract

Generic vibration and noise criteria (VC & NC) exist for semiconductor facility design purposes. This paper proposes to extend the criteria for use in nanotechnology facilities considering the higher level of sensitivity of new equipment without manufacturer's vibration criteria. Specifications are derived for air-borne and structure-borne excitation. The new criteria are referred to as 'VC-NT and NC-NT' curves and proposed to be used for the design of new laboratories and nanotechnology facilities. Three case studies are used to validate the criteria.

Similar Papers
  • Research Article

Generic noise criterion curves for sensitive equipment

  • May 01, 2008
  • The Journal of the Acoustical Society of America
  • Michael L Gendreau
  • Research Article

Low‐frequency noise‐induced vibration of housing structures

  • Sep 01, 1993
  • The Journal of the Acoustical Society of America
  • Bennett M Brooks
  • Conference Article

Designing to Meet Specific Noise and Vibration Criteria on Offshore Platforms

  • May 05, 1974
  • T.H Melling +1
  • Conference Article
  • Citations5

Beech 1900D flight test to characterize propeller noise on the fuselage exterior

  • May 28, 2001
  • Mark Ewing +2
  • Research Article
  • Citations26

On Generic Vibration Criteria for Advanced Technology Facilities: with a Tutorial on Vibration Data Representation

  • Sep 01, 1997
  • Journal of the IEST
  • Hal Amick
  • Research Article
  • Citations8

The development of interior noise and vibration criteria

  • Nov 01, 1990
  • The Journal of the Acoustical Society of America
  • David G Stephens +2
  • Conference Article
  • Citations81

<title>Generic vibration criteria for vibration-sensitive equipment</title>

  • Sep 28, 1999
  • Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
  • Colin G Gordon
  • Research Article

Improvement of footfall vibration of concrete floors: Two case studies

  • Nov 01, 2013
  • The Journal of the Acoustical Society of America
  • Michael Gendreau +1
  • Research Article
  • Citations3

A measurement system for the assessment of the effectiveness of sound-insulating multilayers against structure-borne excitation: design, prototyping and validation

  • Nov 30, 2023
  • INTER-NOISE and NOISE-CON Congress and Conference Proceedings
  • Claudio Bertolini +2
  • Research Article
  • Citations6

Generic vibration criteria–based dual-chamber pneumatic spring vibration isolation table design

  • Jan 23, 2014
  • Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture
  • Zilong Li +2
  • Research Article

Diagnostic criteria assessment of fast emergency care quality on therapeutic profiles in disease conditions at hospitals

  • Jun 08, 2021
  • EMERGENCY MEDICAL CARE
  • I A Turov +3
  • Research Article

Performance-based evaluation on egress safety of disabled welfare facilities

  • Dec 25, 2024
  • International Journal of Urban Sciences
  • Khaliunaa Darkhanbat +5
  • Conference Article

Control of Ship Radiated Underwater Noise

  • Oct 01, 2019
  • Yanran Wang +1
  • Research Article

Case study of the acoustical analysis for three leadership in energy and environmental design for school applications.

  • Oct 01, 2008
  • The Journal of the Acoustical Society of America
  • Threcia Robinson +3
  • Research Article

Mechanical equipment and ambulances. Strange bedfellows of cardiovascular services.

  • Apr 01, 2009
  • The Journal of the Acoustical Society of America
  • Chad N Himmel +1
Cactus Communications logo

Copyright 2026 Cactus Communications. All rights reserved.