Integration, testing, and performance of the Infrared Multi-Object Spectrometer

Digital micromirror devices (DMDs) are micro-electro- mechanical systems, originally developed to display images in projector systems. A DMD in the focal plane of an imaging system can be used as a reprogrammable slit mask of a multi-object spectrometer (MOS) by tilting some of the mirrors towards the spectrometer and tilting the rest of the mirrors away, thereby rejecting the unwanted light (due to the background and foreground objects). A DMD-based MOS can generate new, arbitrary slit patterns in seconds, which significantly reduces the overhead time during astronomical observations. Critically, DMD-based slit masks are extremely lightweight, compact and mechanically robust, which makes them attractive for use in space-based telescopes. As part of a larger effort to investigate the use of DMDs in space telescopes (sponsored by a NASA Strategic Astrophysics Technologies grant), we characterized the optical performance of Texas Instruments DMDs to determine their suitability for use in multi-object spectrometers. The performance of a DMD-based MOS is significantly affected by its optical throughput (reflectance), contrast ratio (the ability of the DMD to reject unwanted light) and scattering properties (which could lead to crosstalk and reduced signal-to-noise ratio in the spectrometer). We measured and quantified the throughput and contrast ratio of a Texas Instruments DMD in several configurations (which emulate the operation of a typical DMD-based MOS) and investigated the scattering properties of the individual DMD mirrors. In this work we present the results of our analysis, describe the performance of a typical DMD- based MOS and discuss the practical limitations of these instruments (such as maximum density of sources and expected signal-to- noise ratio).

Photolithography is one of the core technologies of micro-nano fabrication. Recently, lithography technology is applied to diverse field of technologies. These technologies include MEMS (micro electro mechanical system) devices, FPD (flat panel display), and semiconductor industry. When it comes to the typical exposure process of lithography technology, photomask costs is occupying large portion of the optical system. So, how to reduce the cost of the mask and employing maskless lithography technology has become an important issue to engineers. Although there being both advantages and disadvantages, maskless lithography is a receiving substantial attention from engineers in the fileds of micro-nano fabrication. With the development of technology, low cost, flexibility, efficiency in the fabrication of device are in high demand in maskless lithography technology. How to generate line/space patterns is gaining considerable attention in terms of maskless lithography exposure process. In order to achieve the accurate alignments of numerous optical heads within a reasonable amount of tack time, installing autonomous position align micro parallel manipulator system in each optical heads required. Applied parallel manipulator that consists of four 2-DOF (degree of freedom) decoupled actuator gives chances to provide 6-DOF independence motion, and has strength in high accuracy. It is thus, this parallel manipulator is suitable for the experiment. This paper covers the follows: First, we reported the DMD (Digital Micro mirror Device)-based makless lithography system to introduce spot array method in maskless digital exposure process. Second, applying a redundant parallel micro manipulator and analyzing kinematic characteristic of the 4-[PP]PS parallel manipulator is described. After that, comparing benefits and drawbacks of 4-[PP]PS parallel and 4-DOF serial manipulator is covered. Third, proposing a suitable error model of the system and applying the genetic algorithm to alignment spot array concerning position correction. Finally, we designed experiment which has vision sensor and align unit to verify positioning algorithm. Simulation and experimental result will be shown with the regard to parallel manipulator can find the optimal solution based on genetic algorithm and carry out the problem of spot array alignment by reducing the position error of the system.

Digital micromirror devices (DMDs) are commercial micro-electromechanical systems, consisting of millions of mirrors which can be individually addressed and tilted into one of two states (+/-12deg). These devices were developed to create binary patterns in video projectors, in the visible range. Commercially available DMDs are hermetically sealed and extremely reliable. Recently, DMDs have been identified as an alternative to microshutter arrays for space-based multi-object spectrometers (MOS). Specifically, the MOS at the heart of the proposed Galactic Evolution Spectroscopic Explorer (GESE) uses the DMD as a reprogrammable slit mask. Unfortunately, the protective borosilicate windows limit the use of DMDs in the UV and IR regimes, where the glass has insufficient throughput. In this work, we present our efforts to replace standard DMD windows with custom windows made from UV-grade fused silica, low-absorption optical sapphire (LAOS) and magnesium fluoride (MgF2). We present transmission measurements of the antireflection coated windows and the reflectance of bare (window removed) DMDs. Furthermore, we investigated the long-term stability of the DMD reflectance and experiments for coating DMD active area with a layer of pure aluminum (Al) to boost reflectance performance in the UV spectral range (200400 nm).

We present the novel use of a digital micromirror device (DMD) as a digitally adjustable and programmable aperture for lens-free digital in-line holographic microscopy (LFDIHMY). The proposed micro-electro-mechanical system (MEMS) based DMD aperture can be used as a compact and inexpensive replacement for existing mechanical based aperture control methods required for many resolution enhancement methods. Simulation of the DMD aperture in an in-line holography setup is presented using a general DMD model from literature. A hardware prototype was successfully implemented and demonstrated. The resolution of both simulated and experimental holograms recorded with a conventional pinhole aperture and the proposed DMD aperture are compared using a 1951 USAF resolution test target. We show that a resolution of 2.46 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mathrm { \mu {\textbf {m}}}$ </tex-math></inline-formula> , close to the sensor pixel limit, can be obtained with each aperture. This demonstrates that a DMD can be used as a programmable replacement for a pinhole aperture.

As 3D printer technology has rapidly developed and penetrated into a wide range of applications, several methods for creating 3D objects have been explored and developed. One such method utilizes UV curing of special resins, where the patterning of each layer of the 3D object is determined by a digital micromirror device (DMD) controlled by a digital light processing (DLP) system. This method possesses important advantages over other methods in terms of variable object composition, high spatial resolution, and reduced build times, but usually requires specialized knowledge to program and control the DMD and other printer systems. Not all potential users of 3D printers will be able or willing to acquire this knowledge in order to take full advantage of all th at 3D printing has to offer in their ideas or applications. new software package called Design23DPrint has been developed that provides a user-friendly and intuitive interface for importing, manipulating, and editing 3D objects and has the ability to be readily interfaced with many different DLP and printer control systems. Both layer creation and the positioning of supports can be automated or be manually controlled. Integration of Design23DPrint with existing software packages for DMD control allows the user to edit layers on a pixel-by-pixel basis. The software was integrated with a new 3D printer design developed by Texas Instruments to demonstrate the capabilities of the software to control the printing process and to interface with resident control systems. Keywords: 3D Printer, DLP, DMD, software, interface

The Texas Instruments (TI) digital micromirror device (DMD) is inherently a two dimensional (2-D) blaze grating that causes wavelength-dependent angular spreading of reflected broadband light limiting its use as a broadband variable fiber optic attenuator (VFOA). In this paper, we propose a novel design that utilizes a double-reflection architecture to counter angular spreading while at the same time eliminates the need to use any narrowband components such as wave plates thus delivering a truly flat spectral response VFOA. The key feature of this design is that the DMD, instead of being oriented in the Littrow retro-reflective configuration for the center wavelength, is oriented at a different angle to the input beam such that the blaze condition is still satisfied albeit for a different diffraction order n. The only wavelength dependent loss (WDL) in this design is due to the fact that the blaze condition is satisfied only for a center wavelength λc at which the diffraction efficiency is maximum while at other wavelengths, the blaze condition is not perfectly satisfied resulting in a loss in diffraction efficiency. Simulation results show a WDL of only 0.01 dB over the C-band compared to the previously reported experimental value of ±0.37 dB thus resulting in a truly flat spectral response VFOA.

Intelligent fiber-optic value-added modules (VAMs) are proposed using what we believe to be a novel spatially multiplexed processing technique implemented with both reconfigurable and nonreconfigurable predesigned pixels per impinging beam that enables desired optical power split states needed for realizing a two state reconfigurable VAM. The preferred design uses broadband micromirrors such as ones fabricated via optical microelectromechanical systems technology. The basic VAM design uses two broadband micromirror pixels, where each pixel has its specific location and area and only one of these pixels is electrically driven to adjust its small tilt angle. The areas of the pixels are chosen to obtain the desired tap power. A proof-of-concept VAM with 100% digital repeatability is demonstrated using a Texas Instruments Digital Micromirror Device (DMD) where several micromirrors per beam are used to produce the dual-pixel effect. Example tap ratios experimentally implemented at 1550 nm include 10:90, 20:80, 66.66:33.33, 50:50, 30:70, and 25:75. DMD multipixel diffraction limits output port optical losses to 3.2 and 3.6 dB. The proposed VAM can have an impact in both digital electronic and analog RF optically implemented systems.

Quantitative evaluation of nonablative laser technology.

A planar optic display (POD) is being built and tested for suitability as a high brightness replacement for the cathode ray tube, (CRT). The POD display technology utilizes a laminated optical waveguide structure which allows a projection type of display to be constructed in a thin (1 to 2 inch) housing. Inherent in the optical waveguide is a black cladding matrix which gives the display a black appearance leading to very high contrast. A digital micromirror device, (DMD) from Texas Instruments is used to create video images in conjunction with a 100 milliwatt green solid state laser. An anamorphic optical system is used to inject light into the POD to form a stigmatic image. In addition to the design of the POD screen, we discuss: image formation, image projection, and optical design constraints.

A Planar Optic Display (POD) is being built and tested for suitability as a high brightness replacement for the cathode ray tube, (CRT). The POD display technology utilizes a laminated optical waveguide structure which allows a projection type of display to be constructed in a thin (I to 2 inch) housing. Inherent in the optical waveguide is a black cladding matrix which gives the display a black appearance leading to very high contrast. A Digital Micromirror Device, (DMD) from Texas Instruments is used to create video images in conjunction with a 100 milliwatt green solid state laser. An anamorphic optical system is used to inject light into the POD to form a stigmatic image. In addition to the design of the POD screen, we discuss: image formation, image projection, and optical design constraints.

There are many different modes of microscopy, and all of these modes deliver light in a controlled fashion to the object to be examined and collect as much of the light containing the desired information about the object as possible. The system being presented replaces the simple irises of a conventional microscope with digital micromirror devices (DMDs, made by Texas Instruments) to produce a digital microscope. The DMDs are placed in the optical path at positions corresponding to the field and aperture diaphragms of a conventional microscope. This allows for more precise and flexible control over the spatial location, amount, and angles of the illumination light, and the light to be collected. This digital microscope will improve existing modes of microscopy, specifically in quantitative microscopy. Using the intensity modulation feature of the DMDs, the system can correct for inhomogeneous illumination sources to achieve uniform distributions. In various configurations, one can perform brightfield, darkfield, confocal and fluorescence microscopy. In addition, new microscopy modes will be possible, such as reconstruction microscopy. Utilizing the fast switching times of the mirrors (under 20 microseconds), one can switch between modes efficiently.

Over the last two decades, spatial light modulators (SLMs) have revolutionized our ability to shape optical fields. They grant independent dynamic control over thousands of degrees-of-freedom within a single light beam. In this work we test a new type of SLM, known as a phase-only light modulator (PLM), that blends the high efficiency of liquid crystal SLMs with the fast switching rates of binary digital micro-mirror devices (DMDs). A PLM has a 2D mega-pixel array of micro-mirrors. The vertical height of each micro-mirror can be independently adjusted with 4-bit precision. Here we provide a concise tutorial on the operation and calibration of a PLM. We demonstrate arbitrary pattern projection, aberration correction, and control of light transport through complex media. We show high-speed wavefront shaping through a multimode optical fiber – scanning over 2000 points at 1.44 kHz. We make available our custom high-speed PLM control software library developed in C++. As PLMs are based upon micro-electromechanical system (MEMS) technology, they are polarization agnostic, and possess fundamental switching rate limitations equivalent to that of DMDs – with operation at up to 10 kHz anticipated in the near future. We expect PLMs will find high-speed light shaping applications across a range of fields including adaptive optics, microscopy, optogenetics and quantum optics.

In this paper, we propose a novel digital micromirror device (DMD)-based 2/spl times/2 fiber-optic switch array system. The Texas Instrument 2D DMD has half a million micromirrors; each micromirror is 16 /spl mu/m/spl times/16 /spl mu/m and pixel pitch is 17 /spl mu/m. It has two states of operation (+10/spl deg/ and -10/spl deg/) with a 15 /spl mu/s switching speed and /spl sim/62% optical efficiency. Several micromirrors called a macro-pixel can be used to control an optical beam that travels to the +10/spl deg/ or 10/spl deg/ path.

This paper presents pedagogical issues and experience in teaching the introduction to MEMS (Micro Electro-Mechanical System) course to a group of engineering students, primarily Mechanical Engineering students. The paper draws upon the author’s experience in teaching the MEMS course. Since MEMS is highly inter-disciplinary, the presentation of various relevant topics in MEMS, which may or may not be familiar to a mechanical engineering student, is of critical importance. These topics vary from physics, electrochemistry, materials, and electronic engineering, to various areas in mechanical engineering. An integrated approach for the presentation of subjects, especially in design and fabrication, was found to be very helpful. Moreover, the paradigm shift from the macro world, that most students are familiar and comfortable with, to the micro world is significant and needs to be emphasized. The author found the concept of scaling law, when shifting to the micro world, to be essential in the presentation of MEMS to engineering students in order for them to comprehend the size factor in MEMS. In addition, understanding and appreciation of the strengths and limitations of MEMS are also critical in learning MEMS. Finally, a good textbook will facilitate the learning process of such vast subject. A bibliography of useful textbooks and reference books used by the author will be listed at the end of this paper.

Summary form only given. MEMS (micro electro mechanical systems) and NEMS (nano electro mechanical systems ) have been developed based on silicon micromachining for practical applications. Sophisticated MEMS device used as a two-axis rotating gyroscope for navigation control system was developed. A silicon ring rotor is electrostatically levitated and rotated at 12,000rpm. The 4mm diameter ring rotor and 5m radial gap between rotor and electrode were fabricated using deep RIE (reactive ion etching) and the rotor is sandwiched between two glasses which have control electrodes. The levitation is actively controlled by force balancing in all directions using a capacitive displacement sensing and an electrostatic actuation. The rotation is based on the principle of a variable capacitance motor. The function as the high performance gyroscope and accelerometer were successfully demonstrated. Small size relays for high frequency operation are required for LSI tester. MEMS relay which uses a thermal bimetal actuator for making contact to multi-springs was developed. The springs have electrical connections to the backside using electrical feedthrough in a glass, which results in high frequency response up to 20 GHz. Excellent reliability more than 10/sup 7/ cycles was achieved owing to the hermetic scaling performed by wafer level packaging using anodic bonding of glass and silicon. Multiprobe data storage has been developed. High density electrical feedthrough in a glass was used for the interconnection to its control IC. Electrical rewritable recording on a conductive polymer film and a ferroelectric recording were performed. Electron field emitter array for the purpose of multi-column electron beam lithography was developed using carbon nano tube emitter and electrostatic lens for focusing. It was evident that hydrogen covered carbon nano tube reduces the work function for field emission and the emission noise. Highly sensitive sensors using micro-nano structures such as thin cantilevers have been developed. Bow-tie antenna for near field optical microscope and magnetic resonant force microscope will be presented.