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Optical Interference Signal Processing in Precision Dimension Measurement

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Abstract

The optical techniques are widely used in the automatic measurement and test. In the precision dimension measurement, there are some optical instruments that are widely applied for the microscale or nanoscale dimension measurement, such as the grating, the homodyne interferometer, and the heterodyne interferometer. An optical instrument system is often divided into two main subsystems: the optical subsystem and the electrical subsystem. Moreover, some optical instrument systems also have the mechanical subsystem and the computer subsystems. The optical subsystem includes optical source and other optical elements, such as the polarizing beam splitter, the quarter-wave plate, and so on. The electronic subsystem turns the received optical signals into the electrical signals by the photoelectric receiver, and uses the analog signal system and the digital signal system to process the received signals. A typical structure of the optical instruments is shown as Fig.1.

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