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  • https://doi.org/10.1109/ultsym.1986.198837Copy DOI Icon

Removing the Effects of Surface Roughness in Acoustic Microscopy

  • Jan 1, 1986
  • P Reinholdtsen +1 more
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Abstract

A low-frequency (3-10 MHz) scanning acoustic microscope was used to image subsurface defects in samples with rough surfaces. phase of the reflected signal was measured. By characterizing the angular spectrum of the transducer, it was possible to predict the effect of surface roughness on a defocused image from an image taken with the transducer on focus. This enabled the effects of the surface roughness to be subtracted out of the defocused image, thereby giving enhanced subsurface defect detection. Both the amplitude and

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