Scheduling and optimization of mixed-processing with multi-variety wafers in dual-armed cluster tools

Most cluster tool scheduling studies assume identical access times between chambers or do not discuss the impact of access times. However, the optimal scheduling rule and the cycle time can depend on the access times or physical configuration of parallel chambers. Therefore, we examine cyclic scheduling problems for cluster tools that have nonidentical access times. We first develop Petri net models for tool behaviors and analyze the cycle time by identifying the workloads of the process steps. We prove that the conventional backward and swap sequencing strategies are still optimal for single-armed and dual-armed cluster tools, respectively, when a process step is the bottleneck and the tool repeats a minimal cyclic work cycle. We also present a closed-form formula for the cycle time and identify a coprime condition on the number of parallel chambers for which the cycle time is independent of the order of using parallel chambers. Finally, we develop a mixed integer programming model for cases in which the coprime requirement is not satisfied.

Scheduling of multicluster tools has received much attention due to its complexity of interaction among cluster tools. A cluster tool comprises several modules such as processing modules, a transfer module with a single or dual-armed handling robot, and loadlock modules. A multicluster tool comprises two, three, or more cluster tools that are interconnected with each other. In this paper, we propose a deadlock prevention policy for noncyclic scheduling of dual-armed multicluster tools. The proposed deadlock prevention policy is effective for generating an efficient schedule for two or three-connected multicluster tools with a single or a dual-path flow. This is proven by analyzing the strict minimal siphon of the Petri net model. The performance of the proposed method is compared with that of a maximal permissible deadlock prevention policy. The results demonstrate that the proposed method is computationally efficient for larger state spaces and more suitable than conventional deadlock prevention policies for generating effective schedules for noncyclic scheduling of multicluster tools. Note to Practitioners —Scheduling of multicluster tools has recently attracted attention in the growing semiconductor manufacturing industry. Most conventional studies on multicluster tools focus on cyclic scheduling to minimize cycle time with swap strategy. The challenge addressed by this paper is to derive a deadlock-free schedule for multicluster tools with noncyclic operations. We propose a simple deadlock prevention policy that can be applied to large-scale timed Petri net (PN) model of general multicluster tools without enumeration of siphon computations or solution of mixed integer programming. A timed PN model is developed for noncyclic operations of dual-armed multicluster tools with a dual ath. The computational results show that the approximately 10% of the total throughput of the proposed method is better than those of the conventional methods. It enables more efficient operations for noncyclic scheduling under transient periods including cleaning operations.

There are wafer fabrication processes in cluster tools that require wafer revisiting. If a swap strategy is applied to dual-arm cluster tools handling wafer revisiting, a three-wafer periodical process is formed with three wafers completed in each period. Such a period contains three cycles in a revisiting process and three cycles in a nonrevisiting one. Hence, analysis and scheduling of such tools become very complicated. In this paper, a Petri net (PN) model is developed to describe their operations. Based on it, it is found that, if a swap strategy is applied, such tools are always in a transient state. A systematic method is then presented to analyze their performance. With the help of the proposed PN model, this work, for the first time, derives the optimality conditions of three-wafer period scheduling. Industrial application examples are given to show the results.

Modern semiconductor manufacturing industry tends to reduce the lot size; that is, a lot has a small number of identical wafers, because of demands for small lots and an increased die yield per wafer due to the larger wafer size. Therefore, cluster tools for wafer processing, mostly repeating identical work cycles, are subject to frequent lot changes. We thus examine dual-armed cluster tool scheduling problems for transient periods. We first develop a Petri net model for the tool's operational behavior in a transient period. We then develop a mixed integer programming model for finding an optimal schedule in terms of makespan of a transient period. We also examine how to adapt the conventional swap sequence, which is mostly used for scheduling steady work cycles, for a transient period. This is important to guarantee the compatibility between schedules of steady-state and transient periods because most tools are scheduled by the swap sequence in steady-state periods. To do this, we identify a deadlock-free condition and also propose two efficient scheduling algorithms by modifying the swap sequence. Finally, we experimentally analyze the efficiency of the proposed algorithms.

Scheduling a cluster tool with wafer residency time constraints is challenging and important in wafer manufacturing. With a backward strategy, the scheduling problem of such singlerobot-arm cluster tools is well-studied in the literature. It is much more challenging to schedule a more general case whose optimal scheduling strategy is not limited to the backward one. This work uses a timed Petri net (PN) to model the dynamic behavior of the system and presents a method to determine the optimal scheduling strategy for the system. Based on its PN model and the obtained strategy, it reveals that the key issue to schedule such a tool is to determine when and how long the robot should wait for. Based on this finding, this work establishes for the first time the necessary and sufficient conditions regarding the existence of an optimal and feasible one-wafer cyclic schedule for singlerobot-arm cluster tools. It then formulates a computationally efficient linear program to find it if existing, and finally gives industrial examples to show the application and power of the proposed method.

In semiconductor manufacturing, a process module (PM) failure in cluster tools (CTs) happens from time to time. To effectively operate a CT, such a failure should be handled in a proper and timely manner. This issue becomes much more complicated because wafer residency time constraints (WRTCs) must be met to ensure the quality for some wafer fabrication processes. With such constraints, if a tool is operated under a periodic schedule and a PM fails, it is desired that the tool can still operate under a periodic schedule if it is possible. Nevertheless, the periodic schedule after a PM failure must be different from that before its failure since in this case the tool is degraded. Thus, there must be a transient process between them. It is a great challenge to operate a tool such that it can go through such a transient process with WRTCs being always satisfied. This paper aims to solve this problem by proposing PM failure response policies which can successfully transfer a CT to the feasible schedule after failure from the one before a failure. Then, efficient algorithms are developed to improve these response policies. The proposed policies are composed of simple control laws such that they can be realized in real time and online. Illustrative examples are presented to show their applications.

Green scheduling of dual-armed cluster tool based on cleaning scenarios

Modelling and analysis of kanban-controlled (just-in-time) production systems under realistic assumptions presents a number of challenges, including the ability to conduct both qualitative and quantitative analysis, and the ability to model control policies. These challenges are due, in part, to station interdependence, blocking and starvation due to limited buffer spaces, and the necessity of modelling both material and kanban flows. Petri nets (PNs) have recently emerged as a promising approach for modelling manufacturing systems. PNs are a graphical and mathematical technique useful for modelling concurrent, asynchronous, distributed, parallel, non-deterministic and stochastic systems. PN models can be analysed to determine both their qualitative and quantitative properties. In this paper, we develop stochastic, coloured PN (SCPN) models of a JIT system utilizing two different kanban control policies: a traditional kanban system (TKS) policy and a flexible kanban system (FKS) policy. The resulting models can be used to represent JIT systems of arbitrary size, producing single or multiple types of products, with fixed order points 1. The models are shown to be live and bounded, and can be simulated to produce quantitative results. Sample simulation results are presented to illustrate the models' capabilities.

Due to the trend towards 450 mm diameter wafers and customisation, an increase in wafer diversity and transient operation are anticipated for multi-cluster tools in wafer fabrication. While most previous studies focus on steady state scheduling problem of cluster tools, research on multi-cluster tools scheduling problems with transient operations is still at early stage. This article addresses the dual-armed multi-cluster tools scheduling problem with transient operations and multiple wafer types. The problem is subject to residency constraints and makespan is adopted as the performance metrics. A non-linear mathematical model of the problem is established. To solve this problem, a time constraint sets-based heuristic algorithm, called the TB algorithm, is proposed in this article. Based on SWAP strategy, this article proposed the conception of virtual buffer modules, thus the TB algorithm converts the dual-armed multi-cluster tool scheduling problem into single-armed multi-cluster tools scheduling problem equivalently. Experimental results indicate that the proposed algorithm is feasible and efficient.

In this paper a hybrid approach is proposed for supervisory control of discrete event systems (DES) subject to forbidden states. Assuming that an uncontrolled bounded Petri net (PN) model of a (plant) DES and a set of forbidden state specifications are given, the proposed approach computes a maximally permissive and nonblocking closed-loop hybrid model. The first step is to simplify the given PN model by means of PN reduction rules. The simplified model and the specifications are then represented as buffers, and supervisory control theory (SCT) is applied to obtain a Ramadge–Wonham (RW) supervisor in the form of an automaton. After reduction of the latter’s state size by a ‘control congruence’, the simplified RW supervisor is represented by a so-called auto-net and coupled to the given uncontrolled PN plant model by means of inhibitor arcs to represent the disabling actions. The plant model and supervisor auto-net run concurrently, synchronizing on shared events. This procedure provides a maximally permissive and nonblocking ‘hybrid’ (mixed PN/automaton) closed-loop controlled system. The method is straightforward logically, graphically, and technologically. Its applicability is shown by two examples, one of them a workcell from the PN control literature.

Cyclic scheduling and operation of a residency time- constrained single-arm cluster tool with failure-prone process modules are highly challenging. In some cases, when a fail- ure occurs, there still exists a feasible cyclic schedule for the performance-degraded tool. In other cases, such a schedule no longer exists. For the latter, it is highly desired to respond to a process module failure properly such that the tool can continue working and the wafers in the tool can be completed in a feasi- ble way. This work is the first one to study this important issue. The idea is to apply Petri nets to describe the dynamic behav- ior of a single-arm cluster tool. With the developed Petri net model, this paper formulates failure response policies to control the cluster tool such that it can keep working without violat- ing any residency time constraint. The failure response policies are implemented via efficient real-time control laws. Illustrative examples are presented to show their usage. Index Terms—Wafer fabrication, Cluster tools, Petri net, Scheduling, Failure response.

A treelike hybrid multi-cluster tool is composed of both single-arm and dual-arm cluster tools with a treelike topology. Scheduling such a tool is challenging. For a hybrid treelike multi-cluster tool whose bottleneck individual tool is process-bound, this work aims at finding its optimal one-wafer cyclic schedule. It is modeled with Petri nets such that a onewafer cyclic schedule is parameterized as its robots’ waiting time. Based on the model, this work proves the existence of its onewafer cyclic schedule that features with the ease of industrial implementation. Then, computationally efficient algorithms are proposed to find the minimal cycle time and optimal onewafer cyclic schedule. Multi-cluster tool examples are given to illustrate the proposed approach. The use of the found schedules enables industrial multi-cluster tools to operate with their highest productivity.

Deadlock/livelock problems can cause catastrophic results in flexible manufacturing systems (FMS) by forcing them to stop production processes at an unpredictable stage of production. Therefore, they must be handled properly in order to obtain flawless production in FMS. Petri net (PN) based deadlock/livelock studies for FMS have been widely carried out to obtain live PN models. When a PN model is live, this ensures that the modelled FMS is deadlock-free. Firstly, an uncontrolled (plant) PN model is constructed for the FMS suffering from deadlocks/livelocks. Then reachability graph (RG) analysis of this PN model is carried out to provide all possible reachable states of the modelled system. An RG of a PN model of an FMS suffering from deadlock/livelock problems can be split into the live zone (LZ) and the deadlock zone (DZ). The former is the set of system states considered to be legal (good), while the latter is the set of system states regarded to be illegal (bad). The LZ represents the optimal (maximally permissive) system behavior that must be provided by an optimal control policy. Generally, in PN based liveness studies, a liveness enforcing supervisor (LES) consisting of a set of control places (CP) is computed. Then the controlled (closed-loop) PN model is obtained by merging the plant PN model and the LES. If the number of reachable live states of the controlled PN model is the same as the ones that exist in the LZ, then the controlled model is optimal. Otherwise, it is suboptimal. The greater the number of live reachable states of the RG, the more products to be produced within the FMS. Therefore, the number of reachable live states of the controlled PN model is considered as a quality measure. It defines the behavioral permissiveness of the controlled model. In the literature, to verify the behavioral permissiveness of the PN models, the PN tool called INA (Integrated Net Analyzer) has been widely used. Recently, by means of INA, a method was proposed to compute the number of states within the LZ and the DZ of a given PN model suffering from deadlocks/livelocks. Unfortunately, INA cannot compute RGs of large PNs having a few millions of states. Therefore, in this paper by means of TINA (TIme petri Net Analyzer), an alternative faster and much more efficient method is proposed for the computation of the number of states within the LZ and the DZ for PN models with large RGs. In addition, in order to enable the development of new PN based deadlock prevention methods, further computations are also proposed. These include the computation of the set of states in the DZ, LZ and first met bad markings (FBMs) for a given PN model suffering from deadlocks/livelocks. The applicability and the effectiveness of the proposed methods are demonstrated by considering several well-known examples of FMS from the relevant literature.INDEX TERMS Flexible manufacturing systems (FMS), deadlock, deadlock prevention, Petri Nets (PN), liveness enforcing supervisor (LES), PN computation tools.

In semiconductor manufacturing, wafer residency time constraints make the scheduling problem of cluster tools complicated. A process module (PM) in cluster tools is prone to failure. It is crucial to deal with any such failure in a proper and timely manner. If there are feasible periodic schedules in operating a cluster tool before and after a PM failure, it is desired to make it operate continuously when such a failure occurs. However, due to wafer residency time constraints, it is highly challenging to control a tool such that it can be correctly transferred from a feasible schedule before failure to another after it. To solve this problem, a Petri net model is developed to describe the dynamic behavior of a single-arm cluster tool and failure response policies are proposed. The proposed policies are formulated via simple control laws for their easy implementation. Examples are given to show them.

We examine cyclic scheduling of single-armed and dual-armed cluster tools that concurrently process two wafer types by sharing a process module (PM). Because a PM is shared by two different wafers, the backward and swap sequences, which are prevalently used for single-armed and dual-armed tools without such complexity, respectively, are not effective. We therefore propose new sequences, called alternating backward and alternating swap sequences, for steady cycles of single-armed and dual-armed tools, respectively. We then develop optimality conditions for which the proposed sequences achieve the minimum cycle times in a fundamental cycle, and show that the optimality conditions hold for most practical cases. We also develop a condition for which a shared PM becomes the bottleneck and hence the PM sharing increases the cycle time. For general cycles, we propose heuristic scheduling methods that combine both the alternating backward (or swap) sequence and the conventional backward (or swap) sequence. Finally, we experimentally verify the efficiency and effectiveness of the proposed algorithm for dual-armed cluster tools.