Modeling and Optimal Cyclic Scheduling of Time-Constrained Single-Robot-Arm Cluster Tools via Petri Nets and Linear Programming

In semiconductor manufacturing, wafer residency time constraints make the scheduling problem of cluster tools complicated. A process module (PM) in cluster tools is prone to failure. It is crucial to deal with any such failure in a proper and timely manner. If there are feasible periodic schedules in operating a cluster tool before and after a PM failure, it is desired to make it operate continuously when such a failure occurs. However, due to wafer residency time constraints, it is highly challenging to control a tool such that it can be correctly transferred from a feasible schedule before failure to another after it. To solve this problem, a Petri net model is developed to describe the dynamic behavior of a single-arm cluster tool and failure response policies are proposed. The proposed policies are formulated via simple control laws for their easy implementation. Examples are given to show them.

It is a great challenge to find an optimal one-wafer cyclic schedule for a single-arm multicluster tool that is widely adopted in semiconductor fabrication. Aiming to tackle this significant problem, an optimal scheduling strategy is determined first for each individual tool under the condition that the bottleneck individual tool is transport-bound. Then, by developing a Petri net model with robot waiting being explicitly described to reveal the properties of the entire system, this paper shows that to schedule such a tool optimally is to allocate the robot waiting time properly. Then, this paper presents the necessary and sufficient conditions for the existence of an optimal one-wafer cyclic schedule. Thereafter, an efficient algorithm is developed to check the given conditions and find such a schedule efficiently if existing. Finally, two industrial examples are used to verify that the proposed method is applicable and effective.

Scheduling a multi-cluster tool with wafer residency time constraints is highly challenging yet important in ensuring high productivity of wafer fabrication. This paper presents a method to find an optimal one-wafer cyclic schedule for it. A Petri net is developed to model its dynamic behavior. By using this model, its schedule is found and analytically expressed as a function of robots' waiting time. In addition, this work establishes the necessary and sufficient conditions under which a feasible one-wafer cyclic schedule exists. Then, it gives efficient algorithms to find such a schedule that is optimal. These algorithms require one to determine the robots' waiting time via simple calculation and thus are efficient.

Scheduling of time-constrained single-arm cluster tools with purge operations in wafer fabrications

With the requirements of physical vapor deposition and chemical vapor deposition processes, twin-cluster tools are widely used in the current wafer fabrication. Cycle scheduling ensures that wafers have the same quality, however, twin-cluster tools involve resource coordination between two tools, which makes cycle scheduling more sophisticated. A steady-state cycle scheduling problem of twin-cluster tools with a complete concurrent processing module is studied, considering the wafer residency time constraints. First, a Petri net model is constructed to describe the process of twin-cluster tools under a steady state with the wafer residency time constraints and the complete concurrent processing module, and a control strategy is proposed to avoid the system deadlock. The sufficient conditions for the system to reach the highest efficiency are obtained by analyzing the workload of the processing module and the robot task, and an algorithm is developed to obtain the robot schedule. Finally, examples are verified about the effectiveness of the algorithms.

In semiconductor manufacturing, a process module (PM) failure in cluster tools (CTs) happens from time to time. To effectively operate a CT, such a failure should be handled in a proper and timely manner. This issue becomes much more complicated because wafer residency time constraints (WRTCs) must be met to ensure the quality for some wafer fabrication processes. With such constraints, if a tool is operated under a periodic schedule and a PM fails, it is desired that the tool can still operate under a periodic schedule if it is possible. Nevertheless, the periodic schedule after a PM failure must be different from that before its failure since in this case the tool is degraded. Thus, there must be a transient process between them. It is a great challenge to operate a tool such that it can go through such a transient process with WRTCs being always satisfied. This paper aims to solve this problem by proposing PM failure response policies which can successfully transfer a CT to the feasible schedule after failure from the one before a failure. Then, efficient algorithms are developed to improve these response policies. The proposed policies are composed of simple control laws such that they can be realized in real time and online. Illustrative examples are presented to show their applications.

Cyclic scheduling and operation of a residency time- constrained single-arm cluster tool with failure-prone process modules are highly challenging. In some cases, when a fail- ure occurs, there still exists a feasible cyclic schedule for the performance-degraded tool. In other cases, such a schedule no longer exists. For the latter, it is highly desired to respond to a process module failure properly such that the tool can continue working and the wafers in the tool can be completed in a feasi- ble way. This work is the first one to study this important issue. The idea is to apply Petri nets to describe the dynamic behav- ior of a single-arm cluster tool. With the developed Petri net model, this paper formulates failure response policies to control the cluster tool such that it can keep working without violat- ing any residency time constraint. The failure response policies are implemented via efficient real-time control laws. Illustrative examples are presented to show their usage. Index Terms—Wafer fabrication, Cluster tools, Petri net, Scheduling, Failure response.

We present a jointly optimal selection and scheduling scheme for the lossy transmission of frames governed by a dependency relation and a delay constraint over a link with limited capacity. A main application for this is scalable video streaming. Our objective is to select a subset of frames and decide their transmission schedule such that the overall video quality at the receiver is maximized. The problem is solved for two of the most common classes of dependency structures for video encoding, which include as a special case the popular hierarchical dyadic structure. We formally characterize the structural properties of an optimal transmission schedule in terms of frame dependency. It is shown that regardless of the subset of frames selected for transmission, any optimal schedule has an equivalent canonical form that is a subsequence of a unique universal sequence containing all frames. The canonical form can be computed efficiently through the construction of a dependency tree. This leads to separable but jointly optimal frame selection and scheduling algorithms that have quadratic computational complexity in the number of frames. Simulation with video traces demonstrates that the optimal scheme can substantially outperform existing suboptimal alternatives.

Deadlock/livelock problems can cause catastrophic results in flexible manufacturing systems (FMS) by forcing them to stop production processes at an unpredictable stage of production. Therefore, they must be handled properly in order to obtain flawless production in FMS. Petri net (PN) based deadlock/livelock studies for FMS have been widely carried out to obtain live PN models. When a PN model is live, this ensures that the modelled FMS is deadlock-free. Firstly, an uncontrolled (plant) PN model is constructed for the FMS suffering from deadlocks/livelocks. Then reachability graph (RG) analysis of this PN model is carried out to provide all possible reachable states of the modelled system. An RG of a PN model of an FMS suffering from deadlock/livelock problems can be split into the live zone (LZ) and the deadlock zone (DZ). The former is the set of system states considered to be legal (good), while the latter is the set of system states regarded to be illegal (bad). The LZ represents the optimal (maximally permissive) system behavior that must be provided by an optimal control policy. Generally, in PN based liveness studies, a liveness enforcing supervisor (LES) consisting of a set of control places (CP) is computed. Then the controlled (closed-loop) PN model is obtained by merging the plant PN model and the LES. If the number of reachable live states of the controlled PN model is the same as the ones that exist in the LZ, then the controlled model is optimal. Otherwise, it is suboptimal. The greater the number of live reachable states of the RG, the more products to be produced within the FMS. Therefore, the number of reachable live states of the controlled PN model is considered as a quality measure. It defines the behavioral permissiveness of the controlled model. In the literature, to verify the behavioral permissiveness of the PN models, the PN tool called INA (Integrated Net Analyzer) has been widely used. Recently, by means of INA, a method was proposed to compute the number of states within the LZ and the DZ of a given PN model suffering from deadlocks/livelocks. Unfortunately, INA cannot compute RGs of large PNs having a few millions of states. Therefore, in this paper by means of TINA (TIme petri Net Analyzer), an alternative faster and much more efficient method is proposed for the computation of the number of states within the LZ and the DZ for PN models with large RGs. In addition, in order to enable the development of new PN based deadlock prevention methods, further computations are also proposed. These include the computation of the set of states in the DZ, LZ and first met bad markings (FBMs) for a given PN model suffering from deadlocks/livelocks. The applicability and the effectiveness of the proposed methods are demonstrated by considering several well-known examples of FMS from the relevant literature.INDEX TERMS Flexible manufacturing systems (FMS), deadlock, deadlock prevention, Petri Nets (PN), liveness enforcing supervisor (LES), PN computation tools.

In this paper, we provide expressions for the secrecy outage probability (SOP) for suboptimal and optimal opportunistic scheduling schemes in a reconfigurable intelligent surface (RIS) aided single antenna system with multiple eavesdroppers in approximate closed form. A suboptimal scheduling (SS) scheme is analyzed, which is used when the channel state information (CSI) of the eavesdropping links is unavailable, and the optimal scheduling (OS) scheme is also analyzed, which is used when the global CSI is available. For each scheme, we provide a simplified expression for the SOP in the high signal-to-noise ratio (SNR) regime to demonstrate its behavior as a function of the key system parameters. At high SNR, the SOP saturates to a constant level which decreases exponentially with the number of RIS elements in the SS scheme and with the product of the number of RIS elements and the number of users in the OS scheme. We also show that the derived SOP of the SS scheme can directly provide the SOP for the best antenna-user pair scheduling scheme in a multiple antenna system. We compare the performance of the opportunistic user scheduling schemes with that of a non-orthogonal multiple access (NOMA) based scheduling scheme which chooses a pair of users in each time slot for scheduling and we show that the opportunistic schemes outperform the NOMA-based scheme. We also derive a closed-form expression for the SOP of a decode-and-forward (DF) relay-aided scheduling scheme in order to compare it with that of the RIS-aided system. It is found that the RIS-aided system outperforms the relay-aided system when the number of RIS elements is sufficiently large. An increased number of RIS elements is required to outperform the relay-aided system at higher operating frequencies.

Secrecy outage analysis of multi-user multi-eavesdropper cellular networks in the face of cochannel interference

There are wafer fabrication processes in cluster tools that require wafer revisiting. If a swap strategy is applied to dual-arm cluster tools handling wafer revisiting, a three-wafer periodical process is formed with three wafers completed in each period. Such a period contains three cycles in a revisiting process and three cycles in a nonrevisiting one. Hence, analysis and scheduling of such tools become very complicated. In this paper, a Petri net (PN) model is developed to describe their operations. Based on it, it is found that, if a swap strategy is applied, such tools are always in a transient state. A systematic method is then presented to analyze their performance. With the help of the proposed PN model, this work, for the first time, derives the optimality conditions of three-wafer period scheduling. Industrial application examples are given to show the results.

Timed Petri nets (TPNs) have been widely used for modeling discrete-event systems of diverse manufacturing and service industries. In this article, we introduce a reachability tree-based optimization algorithm to optimize cyclic schedules of TPNs. In particular, we focus on a special class of cyclic schedules that are referred to as one-cyclic schedules, i.e., the algorithm efficiently finds the optimal one-cyclic transition firing schedule of a TPN. The proposed scheduling method can be robustly applied and extended to a number of different scheduling models since the methodology is not bounded to a specific domain. To enhance the computational performance, we establish a set of transition ordering constraints that can reduce the tree size during the search procedure. We evaluate the computational efficiency of the suggested algorithm by examining robotized manufacturing systems where one-cyclic schedules are popularly being used. It is numerically shown that the proposed algorithm is computationally more efficient than the previously studied Petri net-based optimization methods. <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">Note to Practitioners</i> —Resource scheduling is one of the most important managerial issues in diverse industrial systems. An optimal scheduling method for a certain industrial system is often locally developed by utilizing domain-specific operational properties. Although such domain-dependent knowledge can contribute to enhancing the computational efficiency of an optimization method, such an approach has a weak point that the method might not be applicable to scheduling problems of different industrial fields. Our motivation is to develop an algorithm for optimizing steady-state schedules that can be robustly applied for various types of discrete-event systems. The algorithm is developed on the basis of the Petri net modeling framework as it is widely being used for describing cyclic behaviors of diverse manufacturing systems, service systems, and social systems. It is experimentally shown that the proposed algorithm is computationally efficient compared with the existing cyclic scheduling methods.

Scheduling of multicluster tools has received much attention due to its complexity of interaction among cluster tools. A cluster tool comprises several modules such as processing modules, a transfer module with a single or dual-armed handling robot, and loadlock modules. A multicluster tool comprises two, three, or more cluster tools that are interconnected with each other. In this paper, we propose a deadlock prevention policy for noncyclic scheduling of dual-armed multicluster tools. The proposed deadlock prevention policy is effective for generating an efficient schedule for two or three-connected multicluster tools with a single or a dual-path flow. This is proven by analyzing the strict minimal siphon of the Petri net model. The performance of the proposed method is compared with that of a maximal permissible deadlock prevention policy. The results demonstrate that the proposed method is computationally efficient for larger state spaces and more suitable than conventional deadlock prevention policies for generating effective schedules for noncyclic scheduling of multicluster tools. Note to Practitioners —Scheduling of multicluster tools has recently attracted attention in the growing semiconductor manufacturing industry. Most conventional studies on multicluster tools focus on cyclic scheduling to minimize cycle time with swap strategy. The challenge addressed by this paper is to derive a deadlock-free schedule for multicluster tools with noncyclic operations. We propose a simple deadlock prevention policy that can be applied to large-scale timed Petri net (PN) model of general multicluster tools without enumeration of siphon computations or solution of mixed integer programming. A timed PN model is developed for noncyclic operations of dual-armed multicluster tools with a dual ath. The computational results show that the approximately 10% of the total throughput of the proposed method is better than those of the conventional methods. It enables more efficient operations for noncyclic scheduling under transient periods including cleaning operations.

ABSTRACTTo improve the efficiency of wafer fabrication, this work addresses the scheduling and control problems of mixed-processing with multiple wafer types in cluster tools. Then, based on a developed Petri net (PN) model, it presents a general model for cluster tools with multiple wafer types and the conventional swap strategy. By analyzing the coordination mechanism between wafers processing and robot tasks, necessary and sufficient conditions are established to check the schedulability of the system that is operated by using the conventional swap strategy. If the system is not schedulable checked by such schedulability conditions, a constraint-guided heuristic algorithm and a conflicts-avoiding algorithm are developed to obtain a reasonable schedule. Finally, illustrative examples are presented to show the applications of the proposed method.