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  • https://doi.org/10.1116/1.1641053Copy DOI Icon

Trace moisture emissions from heated metal surfaces in hydrogen service

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Abstract

The formation of trace moisture by exposure of dry heated surfaces of 316 L stainless-steel, Restek Silcosteel®, and nickel 1/8 in. outer diameter line segments to purified Ar and H2 was studied using atmospheric pressure ionization mass spectrometry at flow rates of 2 slpm. Prior to H2 exposure, adsorbed moisture was removed by heating incrementally to 500 °C in an argon matrix, where the Restek Silcosteel® material released a maximum of 50 ppb moisture at 300 °C and moisture spikes from the Ni and stainless-steel surfaces reached several 100 ppb. Upon exposure to H2, persistent low ppb moisture emissions due to the reduction of surface oxide species were observed at temperatures as low as 100 °C. Spikes at 300–500 °C ranged from ∼100 ppb for the stainless-steel lines to 400 ppb for the Restek Silcosteel® material. The observed moisture emissions have to be considered as a potential contamination source for high-purity processes utilizing H2 purge at elevated temperatures.

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