- Research Article
17
- 10.1049/el:19960382
Planar graded-index (GRIN) PECVD lens
- Mar 14, 1996
- Electronics Letters
- D.R Beltrami + 6 more +6
The authors report the design, fabrication and characterisation of a planar gradient index (GRIN) PECVD lens. The PECVD-based helicon plasma reactor was used to deposit graded layers onto a silicon wafer. Ray tracing and beam propagation methods were used to simulate the periodic refocussing of the nominally parabolic refractive index profile. Propagation characteristics were measured using a standard prism coupler and also by observing fluorescence from a specially doped thin polymer layer spun on to the top of the planar lens.
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