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  • A Scanning-Spot Interferometer For Measuring Steep Aspherical Surfaces
  • https://doi.org/10.1117/12.941377Copy DOI Icon

A Scanning-Spot Interferometer For Measuring Steep Aspherical Surfaces

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Abstract

The shape of an aspherical surface can optically be measured by focusing a small light spot on its surface. Scanning in a line across the surface and going through the apex of the surface, one can interferometrically detect its shape. This paper describes the performance and limitations of such a scanning-spot interferometer. Special attention is paid to the ability to measure very steep aspherical surfaces.

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