- Supplementary Content
- 10.6842/nctu.2010.00517
Solder Bump製程應用在Wafer Level CSP RDL結構可靠度提升 Study
- Jan 01, 2010
- 王家鴻
RDL (Re-Distribution Layer) structure is an interim product to link up IC chip for wire bonding and flip chip assembly. We can perform area array solder bumps on a chip with peripheral IC pads by means of RDL rerouting technology, and the re-design and re-fabrication procedures of IC chip will not be required. The flip chip technology not only offers miniaturized packaging and higher I/O count but also has better electrical, thermal and reliability performances in comparison with traditional wire bonding. In this study, we investigate how to enhance the reliability property of solder bump with RDL structure by means of materials utilization, bump design and process optimization. In Chapter 1, how WLCSP works and its benefits will be described. Under traditional gold wire design , the I/O pad of IC with peripheral pad turn to area array by RDL rerouting technology. In Chapter 2, the issues faces under RDL process re mentioned, including di-electric de-lamination due to bad adhesion, howthe adhesion improved, and the comparions between different bump structure, with various de-electric selection. Chapter 3 illustrates experiment design, Chapter 4 discusses the testing results from those samples which pass Reliability test , and result in raise Reliability of RDL technology . The end product of this thesis is a WLCSP package composed of bare die onto FR4 substrate without underfill. The optimal design of RDL structure in the study has been qualified and passed wafer-level and board-level reliability tests, including temperature cycling test for 1000 cycles from -55C to 125C
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