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  • https://doi.org/10.1109/icsens.2010.5690549Copy DOI Icon

MEMS microhotplate temperature sensor BIST: Importance and applications

  • Nov 1, 2010
  • M Yaqub Afridi +1 more
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Abstract

This paper describe the importance of temperature sensor built-in self test (BIST) for microhotplate-based sensors. It shows possible ways to implement BIST functionality for microhotplate temperature sensors, including resistance temperature detectors (RTD), microhotplate thermal efficiency, and Thermocouples. A calibration technique is discussed and conclusions are given.

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