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  • https://doi.org/10.1109/icsict.2001.981444Copy DOI Icon

Silicon power devices: RF power transistor & electric power device

  • Oct 22, 2001
  • Ying-Kun Liu +2 more
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Abstract

This paper reviews the history, evolution, and applications of silicon microwave & RF power transistors and electric power devices. The current status of silicon microwave & RF power transistors (BJT, DMOSFET, SIT) and a new kind of electric power device - RSD in HSRI are mainly presented. Important techniques for manufacturing such power devices are introduced. Future trends of such power devices are given briefly.

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