• Home
  • Search
  • The vertical replacement-gate (VRG) process for scalable general-purpose complementary logic
  • Cite Icon36
  • https://doi.org/10.1109/isscc.2000.839720Copy DOI Icon

The vertical replacement-gate (VRG) process for scalable general-purpose complementary logic

  • Feb 7, 2000
  • D Monroe +1 more
Show More
  • Abstract
  • Literature Map
  • References
  • Citations
  • Similar Papers
Abstract

A major challenge in scaling metal-oxide-semiconductor field-effect transistors (MOSFETs) is controlling the gate length, L/sub G/. Variable L/sub G/ leads to variable current drive, requiring conservative digital designs, and to device mismatch that makes the fastest transistors unusable in precision analog designs. The vertical, replacement-gate (VRG) process uses the thickness of a deposited film to precisely define the gate length, while preserving the small gate overlap capacitances and shallow, self-aligned source/drain extensions that are critical to modern MOSFETs. In brief, a silicon device pillar is grown through a multilayer sandwich, whose center layer is later removed and replaced by the gate, and whose upper and lower layers provide dopants for the source/drain extensions. The gate dielectric can be thin, high-quality, thermal SiO/sub 2/ grown on [100]-oriented single-crystal silicon. Previous vertical MOSFET schemes inherently result in poor gate length control, high gate overlap capacitances, or low-quality gate oxides. The first VRG-MOSFETs are competitive with optimized short-channel planar MOSFETs. L/sub G/=200 nm (L/sub ch//spl Gt/190 nm) VRG-n MOSFETs have I/sub on/=1.1 mA//spl mu/m with I/sub off/=11 pA//spl mu/m (and subthreshold swing s=76 mV/dec).

Similar Papers
  • Research Article
  • Citations2

Comparison of Si and SiC MOSFETs responses to electrical stress and the observation of parameter recovery in SiC MOSFET by stress superposition

  • Aug 06, 2024
  • Engineering Research Express
  • Xinyu Wang +1
  • Research Article

Ionizing radiation-induced effects in an ion-implanted MOSFET: a two-dimensional analytical model

  • Apr 01, 2002
  • International Journal of Electronics
  • S Dasgupta +3
  • Research Article
  • Citations18

A numerical analysis of avalanche breakdown in short-channel MOSFETs

  • Jul 01, 1981
  • Solid State Electronics
  • N Kotani +1
  • Research Article
  • Citations14

An in-depth study on WENO-based techniques to improve parameter extraction procedures in MOSFET transistors

  • Dec 02, 2014
  • Mathematics and Computers in Simulation
  • P González +3
  • Research Article

金屬(Al)/ 鋁酸鑭(LaAlO3)/矽(Si)薄膜電容器與場效電晶體之製作與電性分析

  • Jan 01, 2008
  • 尤聖文 +2
  • Research Article
  • Citations89

Optimum High-k Oxide for the Best Performance of Ultra-Scaled Double-Gate MOSFETs

  • Feb 22, 2015
  • IEEE Transactions on Nanotechnology
  • Mehdi Salmani-Jelodar +5
  • Research Article
  • Citations1

Commissioning and performance assessment of diodes and MOSFETs in in-vivo dosimetry for external beam radiation therapy.

  • Mar 04, 2025
  • Radiation and environmental biophysics
  • Omama Al Kharusi +6
  • Book Chapter
  • Citations1

In vivo dosimetry using MOSFET and TLD for Tomotherapy

  • Jan 01, 2009
  • Rajesh A Kinhikar +3
  • Dissertation
  • Citations1

Modeling Of Two Dimensional Graphene And Non-graphene Material Based Tunnel Field Effect Transistors For Integrated Circuit Design

  • Jun 30, 2017
  • Md Shamiul Fahad
  • Conference Article
  • Citations2

Size effect on effective work function in high-k metal gate MOSFET

  • May 01, 2018
  • Jiaqiang Zhou +4
  • Conference Article
  • Citations1

Simulation and Comparative Analysis Between MOSFET and FinFET Based Digital Circuits

  • Oct 07, 2022
  • H Hithashree +1
  • Research Article

Enhanced VDMOS design with reduced parasitic effect

  • Apr 04, 2025
  • International Journal of Modern Physics B
  • Madhulika Prasad +2
  • Research Article
  • Citations3

Kinetic investigation of electron–electron scattering in nanometer-scale metal- oxide-semiconductor field-effect transistors

  • Feb 07, 2008
  • Semiconductor Science and Technology
  • D A Fixel +1
  • Research Article
  • Citations12

Zero‐voltage switching current‐fed flyback converter for power factor correction application

  • Nov 01, 2013
  • IET Power Electronics
  • Nha Trong Quang +3
  • Research Article
  • Citations3

Frequency and bias dependent modeling of induced gate noise and cross-correlation noise in 40 nm metal-oxide-semiconductor field-effect transistors

  • Jan 01, 2016
  • Acta Physica Sinica
  • Wang Jun +2
Cactus Communications logo

Copyright 2026 Cactus Communications. All rights reserved.