• Home
  • Search
  • Thickness and roughness measurement using a reflective digital holographic microscope
  • Cite Icon2
  • https://doi.org/10.1117/12.851469Copy DOI Icon

Thickness and roughness measurement using a reflective digital holographic microscope

  • Abstract
  • Literature Map
  • Citations
  • Similar Papers
Abstract

Digital Holography is a new technology that promises many applications in diverse areas. Using numerical reconstruction of digitally recorded hologram, the Reflection Digital Holographic Microscope (DHM) provides the intensity, phase images which give the 3D depth profile of micro-devices. These essential data provided by digital holography are very useful for new MEMS design and fabrication as well as thin film growth. Having advantages over other existing measurement methods, it can possibly serve as an easier alternative in future. In this study, we further investigate the accuracy and specifications of thickness measurement, topography and roughness analysis using the DHM. By comparing the DHM results with alpha-stepper (a form of stylus probing) and Atomic Force Microscope (AFM), we find that the accuracy of the DHM for thickness measurement and roughness analysis is about 10%. The thickness and roughness range is also found to be 50nm to 500nm. Our experimental study hence demonstrates that digital holography has the potential to be developed into a suitable tool for thickness measurement and roughness analysis due to it being non-invasive and being able to provide quick time and relatively accurate measurements.

Similar Papers
  • Research Article
  • Citations9

A practical criterion for focusing of unstained cell samples using a digital holographic microscope.

  • Jun 05, 2020
  • Journal of Microscopy
  • R Malik +4
  • Research Article
  • Citations40

Quantitative phase microscopy for evaluation of intestinal inflammation and wound healing utilizing label-free biophysical markers.

  • Oct 09, 2017
  • Histology and histopathology
  • Dominik Bettenworth +6
  • PDF
  • Research Article
  • Citations71

Common-path multimodal three-dimensional fluorescence and phase imaging system

  • Feb 06, 2020
  • Journal of Biomedical Optics
  • Manoj Kumar +6
  • Conference Article
  • Citations14

Advantages of digital holographic microscopy for real-time full field absolute phase imaging

  • Feb 07, 2008
  • Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
  • Tristan Colomb +4
  • Conference Article

Overview of the automatic reconstruction method for quantitative phase imaging using a digital holographic microscope operating in non-telecentric regime

  • Mar 16, 2023
  • Brian Bogue-Jimenez +2
  • Conference Article
  • Citations2

Dynamical deformation compensation of phase in digital holographic microscopy

  • Sep 24, 2010
  • Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
  • Tomáš Zikmund +4
  • Research Article
  • Citations23

Compact in-line lensfree digital holographic microscope.

  • Nov 21, 2017
  • Methods
  • Manon Rostykus +3
  • Discussion
  • Citations6

Moving into a new dimension: Tracking migrating cells with digital holographic cytometry in 3D.

  • Dec 16, 2018
  • Cytometry Part A
  • Anette Gjörloff Wingren
  • Research Article
  • Citations9

Applications of digital holographic microscopy in therapeutic evaluation of Chinese herbal medicines.

  • Aug 28, 2014
  • Applied Optics
  • Chung-Hsin Wu +4
  • PDF
  • Research Article
  • Citations35

Quantitative Phase Imaging Using Digital Holographic Microscopy Reliably Assesses Morphology and Reflects Elastic Properties of Fibrotic Intestinal Tissue

  • Dec 01, 2019
  • Scientific Reports
  • Arne Bokemeyer +10
  • Research Article
  • Citations48

Three-dimensional counting of morphologically normal human red blood cells via digital holographic microscopy.

  • Jan 07, 2015
  • Journal of Biomedical Optics
  • Faliu Yi +2
  • Conference Article

Nanocapsule induced morphology and migration changes in single cell layers quantified with digital holographic microscopy

  • Mar 04, 2019
  • Mathias Kaiser +8
  • Research Article
  • Citations27

Super-resolved Mirau digital holography by structured illumination

  • Jun 06, 2017
  • Optics Communications
  • Yasaman Ganjkhani +3
  • PDF
  • Research Article
  • Citations18

Image Processing Techniques for Improving Quality of 3D Profile in Digital Holographic Microscopy Using Deep Learning Algorithm.

  • Mar 19, 2024
  • Sensors
  • Hyun-Woo Kim +2
  • Research Article
  • Citations18

Robust phase aberration compensation in digital holographic microscopy by self-extension of holograms

  • Apr 03, 2019
  • Optics Communications
  • Weilin He +6
Cactus Communications logo

Copyright 2026 Cactus Communications. All rights reserved.