• Home
  • Search
  • Design and Development of Polarization-Enhanced E-Mode GaN p-FET and Complementary Logic (CL) Circuits
  • Cite Icon2
  • https://doi.org/10.1109/ted.2025.3556047Copy DOI Icon

Design and Development of Polarization-Enhanced E-Mode GaN p-FET and Complementary Logic (CL) Circuits

Show More
  • Abstract
  • Literature Map
  • References
  • Citations
  • Similar Papers
Abstract

The low ionization rate of Mg acceptors in the p-gallium nitride (GaN) layer is a critical factor accounting for the low current density of E-mode GaN p-FETs. In this work, polarization-enhanced technology was adopted to enhance the ionization rate of the p-GaN channel. High-performance recessed-gate E-mode GaN p-FETs were fabricated to enable GaN complementary logic (CL) circuits. During fabrication, the channel thickness (<italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">t</i><sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><i>x</i></sub>) is found to be a critical parameter that influences the device metrics. With a decrease in <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">t</i><sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><i>x</i></sub> (i.e., larger recess depth), a more negative threshold voltage (<italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">V</i><sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><roman>th</roman></sub>) is achieved; however, the trade-off is an increase in <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex-math notation="LaTeX">$\textit{R}_{\biosc{on}}$</tex-math></inline-formula>. The E-mode GaN p-FET with <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">t</i><sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><i>x</i></sub> = 32 nm exhibits a <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">V</i><sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><roman>th</roman></sub> of -1.1 V, a high current density of 17.7 mA/mm, a high <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex-math notation="LaTeX">$\textit{I}_{\biosc{on}}$</tex-math></inline-formula>/<inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex-math notation="LaTeX">$\textit{I}_{\biosc{off}}$</tex-math></inline-formula> of 6.9 × 10<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><roman>7</roman></sup>, and a low subthreshold swing (SS) of 93 mV/dec. Furthermore, an E-mode n-channel p-GaN gate high electron mobility transistor (HEMT) was fabricated on the same epi-wafer, exhibiting a <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">V</i><sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><roman>th</roman></sub> of 1.3 V and an <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex-math notation="LaTeX">$\textit{R}_{\biosc{on}}$</tex-math></inline-formula> of 6 <roman xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">Ω⋅</roman>mm. Finally, a GaN CL inverter was fabricated and demonstrated under <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">V</i><sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><roman>DD</roman></sub> = 6 V. Rail-to-rail voltage swing and low static power consumption were both achieved. This work further validates the feasibility of GaN CL integrated circuits and power integrated circuits (PICs).

Similar Papers
  • Conference Article
  • Citations35

A novel low-voltage silicon-on-insulator (SOI) CMOS complementary pass-transistor logic (CPL) circuit using asymmetrical dynamic threshold pass-transistor (ADTPT) technique

  • Aug 08, 2000
  • Bo-Ting Wang +1
  • Research Article
  • Citations20

AlGaN/GaN high electron mobility transistors with selective area grown p-GaN gates**Project supported by the National Natural Sciences Foundation of China (Nos. 61376090, 61306008) and the National High Technology Program of China (No. 2014AA032606).

  • Nov 01, 2016
  • Journal of Semiconductors
  • Yuliang Huang +8
  • Research Article
  • Citations12

Comparative performance evaluation of lateral and vertical GaN high-voltage power field-effect transistors

  • May 14, 2019
  • Japanese Journal of Applied Physics
  • Zhibo Guo +2
  • Research Article
  • Citations8

Evaluation of titanium disilicide/copper Schottky gate for AlGaN/GaN high electron mobility transistors

  • Feb 10, 2017
  • Semiconductor Science and Technology
  • Seonno Yoon +5
  • Conference Article
  • Citations11

Monolithic integration of InGaAs/InAlAs resonant tunneling diode and HEMT for single-transistor cell SRAM application

  • Jan 01, 1992
  • Watanabe +3
  • Research Article
  • Citations4

Double-Phase Adaptive Neural Network for Condition-Based Monitoring of p-GaN HEMT Under Repetitive Short-Circuit Stresses

  • Jan 01, 2023
  • IEEE Transactions on Instrumentation and Measurement
  • Wenjuan Mei +5
  • Research Article
  • Citations22

Reliability of p-GaN Gate HEMTs in Reverse Conduction

  • Jan 14, 2021
  • IEEE Transactions on Electron Devices
  • Deepthi Cingu +9
  • Research Article
  • Citations23

Comparative assessment of InGaAs sub-channel and InAs composite channel double gate (DG)-HEMT for sub-millimeter wave applications

  • Oct 28, 2017
  • AEU - International Journal of Electronics and Communications
  • Saravana Kumar Radhakrishnan +3
  • PDF
  • Research Article
  • Citations3

A highly sensitive vertical plug-in source drain high Schottky barrier bilateral gate controlled bidirectional tunnel field effect transistor.

  • May 19, 2023
  • PLOS ONE
  • Xi Liu +4
  • Research Article
  • Citations1

First Demonstration of Hysteresis-Free IGZO/SnO-Based Complementary Circuits and SRAM with Long-Term Reliability Using SU-8 Passivation

  • Oct 31, 2025
  • Nano Convergence
  • Changwoo Han +7
  • Dissertation

Device engineering for stable and reliable gate operation in Schottky-type p-GaN gate HEMTs

  • Jan 01, 2025
  • Junting Chen
  • Research Article
  • Citations1

Overcoming Welding and Contact Degradation Failures Incurred by Complementary N/MEMS Logic Gate Structures Fabricated on SOI Wafers

  • Apr 01, 2025
  • Journal of Microelectromechanical Systems
  • Bennett Smith +4
  • Conference Article
  • Citations1

Multi-level low swing voltage values for low power design applications

  • May 06, 2001
  • A Rjoub +3
  • Conference Article
  • Citations4

Multiple low swing voltage values for CPL, CVSL and domino logic families

  • Dec 17, 2000
  • A Rjoub +1
  • Conference Article
  • Citations7

Impact of Strain on Electrical Characteristic of Double-Gate TFETs with a SiO&lt;inf&gt;2&lt;/inf&gt;/RfO&lt;inf&gt;2&lt;/inf&gt;Stacked Gate-Oxide Structure

  • Dec 01, 2017
  • Prince Kumar Singh +4
Cactus Communications logo

Copyright 2026 Cactus Communications. All rights reserved.